Blanket Spins

Repeatable, Uniform Coatings for characterization and optimization of etch processes

Pre-etch and post-etch thickness data packages available

Photoresist Stripping

Wet Chemical
Plasma Ashing

Process Integration

TFI proess consultants will design your multiple step process for you

On Site SEM Analysis

SEM Resist Profile to insure quality

X-Sectional and Top Down
SEM in-house systems

Pick Up and Delivery

5 Day Turn Time Available

ETCH Wet Chemical Thermal Oxide SiO2 LPCVD Poly Silicon TEOS BPSG Nitride

PVD Al Al-Si Al-Si-Cu Cu Ta TaN Ti TiN W WSi